Atomic Layer Deposition

Atomic Layer Deposition

Veeco's atomic layer deposition systems (Firebird™, Savannah®, Fiji®, and Phoenix®) are designed to deposit pinhole free coatings that are perfectly uniform in thickness, even deep inside pores, trenches and cavities.

Introducing the Firebird Atomic Layer Deposition System

The Firebird system is a fully automated batch production ALD platform delivering superb uniformity with best-in-class throughput at the lowest possible cost-per-wafer. Integrating proven Veeco automation solutions, it enables safe wafer handling via low-impact batch transfer. Its modular pre-heat & cool-down design enables a flexible thermal management solution tailored around your specifications. The Firebird system’s high capacity reactor(s), low consumables/maintenance costs and compact footprint deliver the most cost-effective solution while exceeding your throughput requirements.  Click here to learn more.
 
Firebird ALD System