Photomask manufacturing demands the highest levels of particle control while depositing sophisticated multiple-layer film structures. This challenge is met with Veeco’s Nexus IBD-LDD Ion Beam Deposition System. Veeco has successfully served the photomask market since the 1990s, and the years of learning have resulted in today’s state-of-the-art system. The IBD-LDD system is ideal for multilayer deposition on EUV mask blanks, and other mask applications requiring low defect levels and advanced thin films.
Our sales team is ready to help.